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Address: No. 1 Tuas Link 2 , 638550 Singapore,

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About Airgard

Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are tailored to individual processes to provide maximum uptime and process stability


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